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8" DRAM FAB
規格介紹:8" DRAM FAB
E-Series-Panel Type-FFU
詳細介紹:
Application: Photo FFU
• Chemical filter: e-series cartridge type
• FFU size: 4"x4"
• CF quantity: 40 sets
• Target AMC: NH3
• Chemical media: ECW-700 (cation ion exchange resin)
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12" DRAM FAB
Application: Photo FFU • Chemical filter: e-series • FFU size: 4"x4 " • CF quantity: >200 sets (over 3 years) • Target AMC: TOC • Chemical media: ECW-500P
12" DRAM FAB
Application: Photo FFU • Chemical filter: e-series • FFU size: 4"x4 " • CF quantity: >100 sets total • Target AMC: TOC, NH3, acid gases • Chemical media: ECW-500P, ECW-700, ECW- 600SN
G5.5 LTPS FAB
Application: FFU • Chemical filter: e-eries • FFU size: 4"x4 " • CF quantity: 846 sets total • Target AMC: TOC, acid gases and boron • Chemical media: ECW-500P (TOC), ECW-800 (acid gases and boron)
12" DRAM FAB
Application: Photo FFU • Chemical filter: e-series cartridge type • FFU size: 4"x4 " • CF quantity: 400 sets total (over three years) • Target AMC: NH3 • Chemical media: ECW-700 (cation ion exchange resin)
