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G5.5 LTPS FAB
規格介紹:G5.5 LTPS FAB
E-Series-Panel Type-FFU
詳細介紹:
Application: FFU
• Chemical filter: e-eries
• FFU size: 4"x4 "
• CF quantity: 846 sets total
• Target AMC: TOC, acid gases and boron
• Chemical media: ECW-500P (TOC), ECW-800 (acid gases and boron)
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