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12" DRAM FAB
規格介紹:12" DRAM FAB
E-Series Cartridge type
詳細介紹:
Application:Facility MAU
• Chemical filter: e-series cartridge type
• Filter size: 595 mm x 595 mm x 292 mm (D)
• MAU quantity: 11 sets
• CF quantity: 385 sets
• Target AMC: H2S, ozone, NO2
• Chemical media: ECW-600SN
• Chemical filter: e-series cartridge type
• Filter size: 595 mm x 595 mm x 292 mm (D)
• MAU quantity: 11 sets
• CF quantity: 385 sets
• Target AMC: H2S, ozone, NO2
• Chemical media: ECW-600SN
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12" DRAM FAB
Application: Facility PCDA • Airflow, 750 and 1500 m3/hr • Chemical filters: duct and pipe type • PCDA systems: 10-12 sets (over 10 years) • Target AMC: TOC and NH3 • Chemical media: ECW-100A and ECW-400
12" DRAM FAB
Application: Facility MAU • Chemical filter: MP-series, densely packed type • Filter size: 610 mm x 610 mm x 450 mm • CF quantity: 16 sets (two stages) • Target AMC: TOC • Chemical media: ECW-100A
