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12" DRAM FAB
規格介紹:12" DRAM FAB
PCDA
詳細介紹:
Application: Facility PCDA
• Airflow, 750 and 1500 m3/hr
• Chemical filters: duct and pipe type
• PCDA systems: 10-12 sets (over 10 years)
• Target AMC: TOC and NH3
• Chemical media: ECW-100A and ECW-400
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12" DRAM FAB
Application: Facility MAU • Chemical filter: MP-series, densely packed type • Filter size: 610 mm x 610 mm x 450 mm • CF quantity: 16 sets (two stages) • Target AMC: TOC • Chemical media: ECW-100A
12" DRAM FAB
Application:Facility MAU • Chemical filter: e-series cartridge type • Filter size: 595 mm x 595 mm x 292 mm (D) • MAU quantity: 11 sets • CF quantity: 385 sets • Target AMC: H2S, ozone, NO2 • Chemical media: ECW-600SN
